ICRA 2012 Paper Abstract


Paper WeC01.2

Ye, Xutao (University of Toronto), Zhang, Yong (University of Toronto), Sun, Yu (University of Toronto)

Robotic Pick-Place of Nanowires for Electromechanical Characterization

Scheduled for presentation during the Regular Session "Micro/Nanoscale Automation II" (WeC01), Wednesday, May 16, 2012, 14:45−15:00, Meeting Room 1 (Mini-sota)

2012 IEEE International Conference on Robotics and Automation, May 14-18, 2012, RiverCentre, Saint Paul, Minnesota, USA

This information is tentative and subject to change. Compiled on June 19, 2018

Keywords Micro and Nanoscale Automation, Micro/Nano Robots


Pick-place of single nanowires inside scanning electron microscopes (SEM) is useful for prototyping functional devices and characterizing nanowires' properties. Nanowire pick-place has been typically performed via teleoperation, which is time-consuming and highly skill-dependent. This paper presents a robotic system capable of automated pick-place of single nanowires. Through SEM visual detection and vision-based motion control, the system transferred individual silicon nanowires from their growth substrate to a microelectromechanical systems (MEMS) device that characterized the nanowires' electromechanical properties. The performance of the nanorobotic pick-up and placement procedures was quantified by experiments. The system demonstrated automated nanowire pick-up and placement with a high reliability.



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