ICRA 2011 Paper Abstract


Paper WeP106.2

Zhang, Hai-Tao (Huazhong (CentralChina) University of Science andTechnology), Chen, Xiang (Huazhong (CentralChina) University of Science andTechnology), Chen, Zhiyong (University of Newcastle)

Dual Mode Predictive Control for Ultrafast Piezoelectric Nanopositioning Stages

Scheduled for presentation during the Regular Sessions "Micro-Nano Robots III" (WeP106), Wednesday, May 11, 2011, 13:55−14:10, Room 5A

2011 IEEE International Conference on Robotics and Automation, May 9-13, 2011, Shanghai International Conference Center, Shanghai, China

This information is tentative and subject to change. Compiled on July 5, 2020

Keywords Micro and Nanoscale Automation, Motion Control of Manipulators, Force Control


Precision control of piezoelectric motor nanopositioning stages are widely used in a variety of nano-manufacturing systems. But due to its hysteresis nonlinearity with input saturation, it is challenging to design an ultrafast output feedback controller with large region of closed-loop stability. To address this problem, we developed a dual-mode nonlinear model predictive control (NMPC) method, in which an optimal input profile found by solving an open-loop optimal control problem drives the nonlinear system state into the terminal invariant set; afterwards a linear output-feedback controller steers the state to the origin asymptotically. In contrast to the classical output-feedback controller, the settling time is effectively decreased and the closed-loop stable region is substantially increased by the present NMPC with almost no loss of the nanopositioning accuracy. Finally, its feasibility and superiority are examined by extensive experiments on a Physik Instrumente P-563.3CL triple-axis nanopositioning stage.



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