ICRA 2011 Paper Abstract


Paper WeA108.5

Yang, Guilin (Singapore Institute of Manufacturing Technology), Teo, Tat Joo (Nanyang Technological University), Chen, I-Ming (Nanyang Technological University), Lin, Wei (SIMTech)

Analysis and Design of a 3-DOF Flexure-Based Zero-Torsion Parallel Manipulator for Nano-Alignment Applications

Scheduled for presentation during the Regular Sessions "Parallel Robots I" (WeA108), Wednesday, May 11, 2011, 09:20−09:35, Room 5C

2011 IEEE International Conference on Robotics and Automation, May 9-13, 2011, Shanghai International Conference Center, Shanghai, China

This information is tentative and subject to change. Compiled on July 14, 2020

Keywords Parallel Robots, Kinematics, Compliant Joint/Mechanism


A flexure-based parallel manipulator (FPM) is a closed-loop compliant mechanism in which the moving platform is connected to the base through a number of flexural legs. Utilizing parallel-kinematics configurations and flexure joints, the FPMs can achieve extremely high motion resolution and accuracy. In this work, we focus on the analysis and design of a 3-DOF zero-torsion FPM for nano-alignment applications. Among various possible zero-torsion parallel-kinematics configurations, it is identified that the 3-legged Prismatic-Prismatic-Spherical (3PPS) is a suitable candidate. Based on the concept of instantaneous rotation, the critical kinematic design issues, such as displacement and workspace analyses, are addressed. With these analysis algorithms, the major kinematic parameters are readily determined to meet the task requirements. To achieve a large workspace, beam-based flexure joints are employed in the FPM design. As the beam-based Universal (U) flexure joints are able to accommodate the required passive prismatic and spherical motions, each flexure PPS leg can be replaced by a simple flexure PU leg. A research prototype of the 3-DOF 3PU FPM has been developed, which achieves position and orientation resolutions of 20 nm and 0.05 arcsecond throughout a workspace of 5 degree by 5 degree by 5 mm, respectively.



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