ICRA 2011 Paper Abstract


Paper WeP213.2

Li, Jin (Shanghai Jiao Tong University), Liu, Pinkuan (Shanghai Jiao Tong University), Ding, Han (Shanghai Jiao Tong University), Cao, Wenwu (The Pennsylvania State University)

Design Optimization and Experimental Study of Acoustic Transducer in Near Field Acoustic Levitation

Scheduled for presentation during the Regular Sessions "Factory Automation" (WeP213), Wednesday, May 11, 2011, 15:40−15:55, Room 5I

2011 IEEE International Conference on Robotics and Automation, May 9-13, 2011, Shanghai International Conference Center, Shanghai, China

This information is tentative and subject to change. Compiled on July 14, 2020

Keywords Semiconductor Manufacturing


Acoustic transducers with large radiation surface are commonly used in non-contact levitation and transportation systems. Traditional modeling can not predict its dynamic performance precisely. There is not enough documented information on design and optimization. A coupled 3D finite element method model has been built in this work. Modal and harmonic analysis has been performed to investigate mechanical and electrical behaviors. Identical experimental conditions have been simulated by FEA modeling to investigate size effect and optimize the transducer. Experiment has been set up to validate the model. The good agreement between the simulated and experimental results shows that the model in design procedure provides an optimal tool to construct an acoustic transducer used in Near Field Acoustic Levitation.



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