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Paper WeA206.3

Zhang, Yan Liang (University of Toronto), Zhang, Yong (University of Toronto), Ru, Changhai (Soochow University), Woo, Patrick (Hitachi High-Technologies Canada), Mitsuhiro, Nakamura (Hitachi High-Technologies Canada), Hoyle, David (Hitachi High-Technologies Canada), Cotton, Ian (Hitachi High-Technologies Canada), Sun, Yu (University of Toronto)

A Compact Closed-Loop Nanomanipulation System in Scanning Electron Microscope

Scheduled for presentation during the Regular Sessions "Micro-Nano Robots II" (WeA206), Wednesday, May 11, 2011, 10:35−10:50, Room 5A

2011 IEEE International Conference on Robotics and Automation, May 9-13, 2011, Shanghai International Conference Center, Shanghai, China

This information is tentative and subject to change. Compiled on December 8, 2019

Keywords Micro/Nano Robots

Abstract

This paper presents a nanomanipulation system for operation inside scanning electron microscopes (SEM). The system is small in size, capable of being mounted onto and demounted from an SEM through the specimen exchange chamber without breaking the high vacuum of the SEM. This advance eliminates frequent opening of the high-vacuum chamber, thus, incurs less contamination to the SEM, avoids lengthy pumping, and significantly eases the exchange of end-effectors (e.g., nano probes and grippers). The system consists of two independent 3-DOF Cartesian nanomanipulators based on piezo motors and piezo actuators. High-resolution optical encoders are integrated into the nanomanipulators to provide position feedback for closed-loop control. A look-then-move control system and a contact detection algorithm are implemented for horizontal and vertical nanopositioning. The system design, system characterization details, and system performance are described.

 

 

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