ICRA 2011 Paper Abstract


Paper ThP105.5

Wu, Naiqi (Guangdong University of Technology), CHU, Feng (Université d'Evry Val d'Essonne), Chu, Chengbin (Ecole Centrale Paris), Zhou, MengChu (New Jersey Inst. of Technology)

Petri Net-Based Cycle Time Analysis of Dual-Arm Cluster Tools with Wafer Revisiting under Swapping Strategy

Scheduled for presentation during the Regular Sessions "Manipulation Planning III" (ThP105), Thursday, May 12, 2011, 14:40−14:55, Room 3G

2011 IEEE International Conference on Robotics and Automation, May 9-13, 2011, Shanghai International Conference Center, Shanghai, China

This information is tentative and subject to change. Compiled on August 18, 2019

Keywords Discrete Event Dynamic Automation Systems, Factory Automation, Planning, Scheduling and Coordination


There are wafer fabrication processes in cluster tools that require revisiting. It is shown that swapping is efficient in operating a dual-arm cluster tool. For dual-arm cluster tools with wafer revisiting, if a swap strategy is applied, it forms a three wafer periodical process with three wafers completed in each period. Such a period contains three cycles in a revisiting process and another three cycles in non-revisiting process. Hence, analysis and scheduling of dual-arm cluster tools with wafer revisiting become very complicated. In this work, a Petri net model is developed to describe the operations of such tools. Based on it, it is found that if a swap strategy is applied to a dual-arm cluster tool with wafer revisiting, it is always in a transient state. A systematic method is presented to analyze its performance.



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